3D Optical Microscopes

Nanometer resolution 3D optical profilometers. Advanced, modular, and compact 3D optical profilers with automatic profilometry measurement and analysis.

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Choose Between The Best 3D Optical Profilometers

The high-resolution 3D optical profilometers combine many optical imaging techniques on one platform. Measure roughness, step height, texture, geometry, thickness, and more for any material.

Universal Profilometer UP-5000 for advanced profilometry

Confocal Microscope + Interferometer + AFM, Raman, Spectral Film Thickness and More

Universal 3D Optical Microscope UP-3000 for advanced profilometry

Confocal Microscope + Interferometer + Dark Field Imaging and More

White Light Interferometer UP-2000

White Light Interferometer

High Speed Analysis

Industry leading high-resolution camera with 200 FPS for high speed scanning.


Highest Z Resolution

State of the art encoders provide the highest Z resolution independent of scanning distance.

Versatile Platform

Open frame design and customizable XY stage. Environmental controls and many sample holders to accommodate various shapes.

Powerful Software

Precise, easy to use, automatic, quantitative, and ISO-compliant Software.

Why 3D Optical Profilometers?

Rtec Instruments optical profilers’ revolutionary surface profiling analyzes any surface with ease. Magnify images and measure profilometry features from nm to mm on a single platform. As a result, our optical systems investigate atomic structures with a single click. Furthermore, our optical profilers measure roughness, waviness, film thickness, and chemical property map. This comprehensive surface profiling approach is the first in the industry.

Rtec-Instruments Sigma and Lambda 3D optical profilometer heads

We Deliver
High Quality

ISO Compliant Metrology Analysis


Instruments come with standard test protocols to ensure normalized profilometry testing.

Surface Analysis For Every Sample and Situation

micro fluidic 3D profilometry image on rtec universal profiler
Micro Fluidic Channels
transparent coating profilometry data using rtec 3d optical microscope
Transparent Coating
Polymer coating profilometry data using rtec 3d optical microscope
Polymer Coating

Sub-Nanometer 3D Features

Rtec 3D Optical Microscopes analyze nm features on rough, transparent, or smooth surfaces. We provide the highest Z and XY optical profilometry resolutions. Additionally, confocal microscopy and white light interferometry are on the same platform.

Wafers and Semiconductors

semicon 3d profilometry image data on rtec universal profiler
pellicles surface  data using rtec 3d optical microscope
wafer surface  data using rtec 3d optical microscope
turning sample 3d data using rtec 3d optical microscope
Turning Sample
scratch test 3d data using rtec 3d optical microscope
indentation 3d image on rtec universal profiler

Quality Control

Find cracks and defects with one click. Our 3D optical profilers provide automatic reports and pass-fail criteria analysis. Rtec metrology platforms are the solution for R&D and quality control environments.

What Are 3D Optical Microscopes?

3D optical microscopes characterize three-dimensional surface topography. First, they optically capture multiple surface images. Then, the microscope stitches the images together in XYZ axis. Finally, they quantifying the data to calculate roughness, step height, film thickness, curvature, bow, and defects. However, all this is not possible with traditional 2D optical microscopy. Our 3D optical profilers use a combination of techniques to provide a quantitative 3D surface. Learn more about these techniques below.

What Is Nipkow Confocal Imaging?

Confocal microscopy is a non-contact optical imaging technique. It allows for higher resolution and contrast of surface topography utilizing pin holes. First, these pin holes block out-of-focus light during image scanning. Then, white light and a Nipkow confocal disk capture a large sample area at a very high speed creating a three-dimensional scan. The UP-5000 and UP-3000 3D optical microscopes have this feature.

What Is A White Light Interferometer?

White light interferometry (WLI) is a non-contact optical method. WLI characterizes surface topography using scanning interferometry. The technique involves a beam splitter that splits a light beam into a measurement beam and a reference beam. Then these beams are then recombined to create an interference pattern and are then analyzed to generate 2D and 3D models of surfaces. Rtec Instruments’ UP-2000 WLI Optical Profilometers specialize in this feature.

What is Dark Field Imaging?

Dark field microscopy is a technique that creates high resolution contrast in specimens that are not imaged well under normal bright field imaging conditions. Using special dark field objectives and a dedicated light system, a dark background  is created. This allows for a high degree of contrast for surface features. All Rtec 3D Optical microscopes provide dark field microscopy.

What Is Variable Focus Imaging?

Variable Focus Imaging is an imaging technique used to get a surface image completely in focus. Our microscopes complete this by capturing images at different X, Y, and Z values. Then they stitch the images together to create a fully focused bright field profile of the surface. Both 2D and 3D images use this technique. Each of the Rtec Instruments 3D Optical Microscopes use variable focus imaging for crystal clear imaging.

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