Choose Between The Best 3D Optical Microscopes
The unique and high resolution universal profilometers combine multiple optical imaging techniques into one platform for comprehensive analysis. Measure roughness, step height, texture, geometry, thickness, and more for any material.
UP-5000
Confocal Microscope + Interferometer + AFM, Raman, Spectral Film Thickness and More
UP-3000
Confocal Microscope + Interferometer + Dark Field Imaging and More
UP-2000
White Light Interferometer
High Speed Analysis
Industry leading high resolution high speed camera with 200 FPS for high speed scanning.
Highest Z Resolution
State of the art encoders provide the highest Z resolution independent of scanning distance.
Versatile Platform
Open frame design, customizable XY stage, environmental controls, and multiple sample holders to accommodate various shapes.
Powerful Software
Precise, easy to use, automatic, quantitative, and ISO-compliant Software.
Why
Universal Profilometers
Rtec Instruments profilometers offer a unique combination of imaging techniques to help customers analyze any surface with ease. Measure features from nm to mm on a single platform, Investigate the surface by measuring roughness, waviness, film thickness, chemical property map and atomic structures automatically with a single click. This highly comprehensive surface measure approach is the first in the industry.
We Deliver
High Quality
ISO Compliant Metrology Analysis
Instruments come with standard test protocols to ensure normalized testing.
Surface Analysis For Every Sample and Situation
Micro Fluidic Channels
Transparent Coating
Polymer Coating
Sub-Nanometer 3D Features
Analyze nm features on rough, transparent, or smooth surfaces with highest Z and XY resolutions. Use confocal microscopy and white light interferometery on the same platform.
Wafers and Semiconductors
With stages up to 300×300 mm, analyze full wafer, devices, and pellicles for defects, structures, step height, thickness, particles and more. Combine AFM, Raman, and optical profiler data for the same area.
Features
Particles
Wafers
Turning Sample
Scratch
Indentation
Quality Control
Find cracks and defects with a one click. Automatic reports and pass-fail criteria analysis helps to use the platform for both R&D and quality control environment.
What is 3D A Microscope?
The 3D microscope involves characterizing three-dimensional surface topography by optically capturing multiple surface images, stitching the images together in XYZ axis, and quantifying the data to calculate roughness, step height, film thickness, curvature, bow, and defects. All of this is not possible with traditional 2D optical microscopy. Various techniques exist that create 2D and 3D images of surfaces. Rtec Instruments products use a combination of them to provide a quantitative 3D image surface.
What Is Nipkow Confocal Imaging?
Confocal microscopy is a non-contact optical imaging technique that allows for higher resolution and contrast of surface topography by means of pin holes. These pin holes block out-of-focus light during image scanning. This three-dimensional scan using white light and a Nipkow confocal disk captures large sample area at a very high speed.
What Is A White Light Interferometer?
What Is Dark Field Imaging?
Dark field microscopy is a technique that creates highest resolution contrast in specimens that cannot be imaged well under normal bright field imaging conditions. Using special dark field objectives and a dedicated light system, a dark background is created that allows for high degree of contrast for surface features.
What Is Variable Focus Imaging?
Variable Focus Imaging is an imaging technique used to obtain a surface image completely in focus. This is done by capturing images at different X, Y, and Z values to stitch them together to create a fully focused bright field image of the surface. This is used both in 2D and 3D images.
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