3D Optical Microscopes

Nanometer resolution 3D optical profilers.
Fully automatic measurement and analysis.
Home > 3D Optical Microscopes

Choose Between The Best 3D Optical Microscopes

The unique and high resolution universal profilometers combine multiple optical imaging techniques into one platform for comprehensive analysis. Measure roughness, step height,  texture, geometry, thickness, and more for any material.

Universal Profilometer UP-5000

Confocal Microscope + Interferometer + AFM, Raman, Spectral Film Thickness and More

Universal 3D Optical Microscope

Confocal Microscope + Interferometer + Dark Field Imaging and More


White Light Interferometer UP-2000

White Light Interferometer


High Speed Analysis

Industry leading high resolution high speed camera with 200 FPS for high speed scanning.


Highest Z Resolution

State of the art encoders provide the highest Z resolution independent of scanning distance.

Versatile Platform

Open frame design, customizable XY stage, environmental controls, and multiple sample holders to accommodate various shapes.

Powerful Software

Precise, easy to use, automatic, quantitative, and ISO-compliant Software.


Universal Profilometers

Rtec Instruments profilometers offer a unique combination of imaging techniques to help customers analyze any surface with ease. Measure features from nm to mm on a single platform, Investigate the surface by measuring roughness, waviness, film thickness, chemical property map and atomic structures automatically with a single click. This highly comprehensive surface measure approach is the first in the industry.

We Deliver
High Quality

ISO Compliant Metrology Analysis

Instruments come with standard test protocols to ensure normalized testing.

Surface Analysis For Every Sample and Situation

sand paper image on rtec universal profiler
Micro Fluidic Channels
Polymer coating data using rtec 3d optical microscope
Transparent Coating
Polymer coating data using rtec 3d optical microscope
Polymer Coating

Sub-Nanometer 3D Features

Analyze nm features on rough, transparent, or smooth surfaces with highest Z and XY resolutions.  Use confocal microscopy and white light interferometery on the same platform.

Wafers and Semiconductors

With stages up to 300×300 mm, analyze full wafer, devices, and pellicles for defects, structures, step height, thickness, particles and more. Combine AFM, Raman, and optical profiler data for the same area.

sand paper image on rtec universal profiler
Diamond surface  data using rtec 3d optical microscope
Diamond surface  data using rtec 3d optical microscope
Polymer coating data using rtec 3d optical microscope
Turning Sample
Polymer coating data using rtec 3d optical microscope
sand paper image on rtec universal profiler

Quality Control

Find cracks and defects with a one click. Automatic reports and pass-fail criteria analysis helps to use the platform for both R&D and quality control environment.

What is 3D A Microscope?

The 3D microscope involves characterizing three-dimensional surface topography by optically capturing multiple surface images, stitching the images together in XYZ axis, and quantifying the data to calculate roughness, step height, film thickness, curvature, bow, and defects. All of this is not possible with traditional 2D optical microscopy. Various techniques exist that create 2D and 3D images of surfaces. Rtec Instruments products use a combination of them to provide a quantitative 3D image surface.

What Is Nipkow Confocal Imaging?

Confocal microscopy is a non-contact optical imaging technique that allows for higher resolution and contrast of surface topography by means of pin holes. These pin holes block out-of-focus light during image scanning. This three-dimensional scan using white light and a Nipkow confocal disk captures large sample area at a very high speed.

What Is A White Light Interferometer?

White light interferometry is a non-contact optical method that characterizes surface topography using scanning interferometry. The technique involves a light beam that is split into a measurement beam and a reference beam using a beam splitter. These beams are then recombined to create an interference pattern and are then analyzed to generate 2D and 3D models of surfaces.

What Is Dark Field Imaging?

Dark field microscopy is a technique that creates highest resolution contrast in specimens that cannot be imaged well under normal bright field imaging conditions. Using special dark field objectives and a dedicated light system, a dark background  is created that allows for high degree of contrast for surface features.

What Is Variable Focus Imaging?

Variable Focus Imaging is an imaging technique used to obtain a surface image completely in focus. This is done by capturing images at different X, Y, and Z values to stitch them together to create a fully focused bright field image of the surface. This is used both in 2D and 3D images.

Want to learn more?

Get in touch, and request a demo.


© Copyright 2021 Rtec-Instruments - All Rights Reserved