Film Thickness Probe

Easy integration, non-contact, non-destructive, one-click film thickness measurement.

Linear reciprocating drive for linear friction and wear studies

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RProbe-2000 Overview

Module Features

Precision: <0.01 nm or 0.01%
Accuracy: <0.2% or 1 nm
Stability: <0.02 nm or 0.03%
Spot Size: Depends on objective (4 um to 200 um. 2mm)
Sample Size: Platform dependent

Rtec Solution The RProbe-2000 provides real-time, one-click measurement and analysis of thickness, n&k, and roughness. This film thickness probe is easy to use with no expert knowledge required. Additionally, the system Includes a powerful analysis package scaling correction, multi-sample measurement, and dynamic measurement. Furthermore, with an extensive materials library (500+) and history of analysis: recall/display measurement results and statistics. Contact us to learn more about our film thickness measurement integration.

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Seamless Film Thickness Measurement Integration

RProbe-2000 film thickness probe across various solutions

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3D Universal Profilometer, UP-3000

Standard Configurations

The table shows the basic specification for the RProbe-2000.

Model RProbe-2000-XX	Wavelength Range	Spectrometer/Detector/Light source	Thickness Range*
Vsbl-a	400-1100 nm	Spectrometer F4/Si 3600 pixels/ Tungsten – Halogen light source	10 nm to 75 µm
UvVisbl	200-1000 nm	Spectrometer F4/ Si CCD 2048 pixels/ Deuterium & Tungsten-Halogen light source	1 nm to 75 µm (option: up to 150µm)
Vsbl	700-1100 nm	HR Spectrometer F4/Si 2048 pixels/ Tungsten – Halogen light source	1 µm to 400 µm
Nifr	900-1700 nm	NIR F4/512 InGaAs PDA/Tungsten-Halogen light source	50 nm – 100 µm
Vsbl-Nifr	400-1700 nm	Spectrometer F4 Si CCD 3600 pixels(Vis channel);NIR F4/512 InGaAs PDA (NIR channel) Tungsten-Halogen light source	10 nm – 100 µm
UvVsblNifr	200-1700 nm	Spectrometer F4 Si CCD 2048 pixels (UVVis channel); NIR F4/512 InGaAs PDA( NIR channel) Deuterium & Tungsten-Halogen light source	1 nm – 100 µm
Visbl-HF	400-1100 nm	F4/Si 2048 pixels, Tungsten Halogen light source. High frequency measurement version of MProbe Vis system (LAN interface, 10µs integration time)	10 nm – 70 µm
NifrHr	1500-1550 nm	NIR F4/512 InGaAs PDA/Tungsten-Halogen light source or SLD (super-luminescent diode)	10 nm – 1800 µm (quartz) 4 µm – 500 µm (Si)

* T, n & k measurement in 25nm – 20µm thickness range. Maximum thickness limits are listed for R.I.= 1.5
Other configuration are available.

Film Thickness Probe Features

The RProbe provides reliable, traceable, and repeatable film thickness measurement and analysis.

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Analysis of Translucent or Light absorbing films

This includes oxides, nitrides, photoresists, polymers, semiconductors, hard coatings, thin metal films, and many more

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Thin Solar Cells

aSi, TCO, CIGS, CdS, CdTe – full solar stack measurement. LCD, FPD application: ITO, Cell Gaps, Polyamides.
Optical Coatings: dielectric filters, hardness coating, anti-reflection coating
Semiconductor and dialectics: Oxides, Nitrides, OLED stack