Film Thickness Probe:

Messungen der Schichtdicken

Einfache Integration, berührungslose, zerstörungsfreie Schichtdickenmessung mit einem Klick.

Linear reciprocating drive for linear friction and wear studies
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RProbe-2000: Übersicht

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    Seamless Integration

    RProbe-2000 film thickness probe across various solutions

    Standard Configurations

    The table shows the basic specification for the RProbe-2000.
    Model RProbe-2000-XX Wavelength Range Spectrometer/Detector/Light source Thickness Range*
    Vsbl-a 400-1100 nm Spectrometer F4/Si 3600 pixels/ Tungsten – Halogen light source 10 nm to 75 µm
    UvVisbl 200-1000 nm Spectrometer F4/ Si CCD 2048 pixels/ Deuterium & Tungsten-Halogen light source 1 nm to 75 µm (option: up to 150µm)
    Vsbl 700-1100 nm HR Spectrometer F4/Si 2048 pixels/ Tungsten – Halogen light source 1 µm to 400 µm
    Nifr 900-1700 nm NIR F4/512 InGaAs PDA/Tungsten-Halogen light source 50 nm – 100 µm
    Vsbl-Nifr 400-1700 nm Spectrometer F4 Si CCD 3600 pixels(Vis channel);NIR F4/512 InGaAs PDA (NIR channel) Tungsten-Halogen light source 10 nm – 100 µm
    UvVsblNifr 200-1700 nm Spectrometer F4 Si CCD 2048 pixels (UVVis channel); NIR F4/512 InGaAs PDA( NIR channel) Deuterium & Tungsten-Halogen light source 1 nm – 100 µm
    Visbl-HF 400-1100 nm F4/Si 2048 pixels, Tungsten Halogen light source. High frequency measurement version of MProbe Vis system (LAN interface, 10µs integration time) 10 nm – 70 µm
    NifrHr 1500-1550 nm NIR F4/512 InGaAs PDA/Tungsten-Halogen light source or SLD (super-luminescent diode) 10 nm – 1800 µm (quartz) 4 µm – 500 µm (Si)
    * T, n & k measurement in 25nm – 20µm thickness range. Maximum thickness limits are listed for R.I.= 1.5 Other configuration are available.

    Film Thickness Probe Features

    The RProbe provides reliable, tracable, and repeatable film thickness analysis.
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    Analysis of Translucent or Light absorbing films
    This includes oxides, nitrides, photoresists, polymers, semiconductors, hard coatings, thin metal films, and many more
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    Thin Solar Cells
    aSi, TCO, CIGS, CdS, CdTe – full solar stack measurement. LCD, FPD application: ITO, Cell Gaps, Polyamides. Optical Coatings: dielectric filters, hardness coating, anti-reflection coating Semiconductor and dialectics: Oxides, Nitrides, OLED stack

    A Film Thickness Solution

    The RProbe-2000 is used extensively across a wide range of industries:
    • Aerospace
    • Hard Coating
    • Metal
    • Semiconductor
    • Polymer

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