3D Optical Profilometer
UP-2000 High Speed White Light Interferometer
The UP-2000 is a fully automatic white light interferometer and advanced 3D optical profiler designed for fast, accurate, and non-contact surface characterization. It delivers high-speed, sub-nanometer measurements for surface roughness, step height, film thickness, and topography analysis, making it ideal for demanding research, development, and quality control applications. Its intuitive operation enables users to perform precise measurements with minimal setup, improving productivity and repeatability. Built to meet ISO-compliant surface metrology standards, the UP-2000 provides reliable, high-resolution data for a wide range of materials and industries, supporting both routine inspections and advanced analytical workflows with exceptional precision.
KEY FEATURES
High-Speed Colored Camera for Fast Acquisition
The UP-2000 features an industry-leading 200 fps high-speed camera for rapid white light interferometry (WLI) and phase shifting interferometry (PSI) measurements. High frame rates significantly reduce scan times while maintaining sub-nanometer precision, delivering fast, accurate, and reliable 3D surface metrology for research, manufacturing, and quality control applications.
Dual WLI and PSI Measurement Modes
The UP-2000 features a quad-band LED light source with red, blue, green, and white illumination for optimized White Light Interferometry (WLI) and Phase Shifting Interferometry (PSI). Automatic wavelength selection maximizes image contrast across different materials, delivering fast, accurate, and versatile non-contact 3D surface metrology without changing the optical setup.
ISO-Compliant Analysis Software
Simply load a measurement recipe and click Start. The UP-2000 automatically measures and reports Ra, Rq, Rz (ISO 4287) and Sa, Sq, Sz (ISO 25178) directly from the 3D dataset. Automated analysis, one-click report generation, and optional automatic report printing streamline surface metrology workflows, requiring no prior metrology experience.
Automatic Stitching
One-click automatic image stitching seamlessly combines multiple adjacent scans into a single large-area 3D surface map. High-precision cross-roller stages ensure accurate positioning between acquisitions, while the UP-2000 automatically aligns and assembles the complete dataset. The result is fast, reliable large-area surface metrology with exceptional accuracy and repeatability.
Sub-Nanometer Z Resolution at Any Magnification
The UP-2000 uses latest-generation encoders to deliver sub-nanometer vertical resolution regardless of scan range or objective magnification. Consistent Z-axis accuracy ensures reliable, repeatable 3D surface measurements across different applications, operators, and production environments, making it ideal for precision surface metrology and quality control.
More about

For precise surface measurements and topography analysis, a white light interferometer profilometer is an advanced tool widely used across many industries. In fact, for challenging nano-scale measurements, engineers often rely on a white light interferometer profilometer for the best results.
Highest Z Resolution At Any Magnification
Combining white light interferometry with phase shift interferometry gives the UP-2000 its class-leading vertical resolution, independent of objective magnification. This is one of the clear advantages of a white light interferometer profilometer system. Furthermore, encoder-referenced vertical scanning means a 5x and a 50x objective deliver the same sub-nanometer height precision. As a result, operators choose magnification for field of view, never for accuracy.
Surface Roughness and Step Height Measurement
The UP-2000 calculates surface roughness parameters directly from the 3D dataset. Profile parameters (Ra, Rq, Rz) and areal parameters (Sa, Sq, Sz) furthermore comply with ISO 4287 and ISO 25178. Additionally, step height measurement, texture, and surface form are all quantified in a single acquisition.


3D Topography and Wear Analysis
The UP-2000 provides high-resolution 3D surface topography for comprehensive wear analysis, surface characterization, and dimensional metrology. When reviewing wear and texture on complex surfaces, many experts choose a white light interferometer profilometer for data accuracy. Furthermore, advanced analysis tools accurately quantify wear scars, surface texture, step height, form, waviness, and surface roughness from a single non-contact measurement. Wear volume is consequently calculated automatically by integrating the material loss below a user-defined reference plane. As a result, this enables precise evaluation of wear mechanisms and material performance. Additionally, cross-sectional profiles can be generated at any location to measure wear scar depth, width, and pile-up height with sub-nanometer vertical resolution. Moreover, automatic image stitching combines multiple scans into a seamless large-area 3D dataset. The UP-2000 is therefore ideal for analyzing wear tracks, scratches, coatings, semiconductor wafers, precision components, and engineered surfaces in research, product development, and industrial quality control.

| Imaging Mode | White Light Interferometry |
|---|---|
| Surface measurement | Roughness, 3D topography, step height and surface texture |
| Motorized XYZ stage | 150 × 200 × 150 mm |
| International Standards | ISO 25178 - ISO 16610 - ISO 12781 - ISO 4287 - EUR 15178 |
